Analysis system for UF6High-performance quadrupole mass spectrometer system for UF6 analysis.The quadrupole system, which has a high transmission and excellent stability, enables very precise determination of the isotope ratios in UF6 mixtures.The use of a special molecular beam ion source, LN2 cooling trap and suitable sample inlet and valve materials reduce memory and wear effects to a minimum. This system is therefore also suitable for the analysis of other corrosive gas mixtures.